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近红外二区成像
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For Be detection only one spectrometer is required.Spectrometer Module 1: 180 nm – 255 nm, DUV detector coating, FWHM = approx. 0.05 nmor Be detection only one spectrometer is required.Spectrometer Module 1: 180 nm – 255 nm, DUV detector coating, FWHM = approx. 0.05 nm For Be detection only one spectrometer is required.Spectrometer Module 1: 180 n For Be detection only one spectrometer is required.Spectrometer Module 1: 180 n